Nikon Optistation-V Water Inspection System

Nikon Updated: 2009-04-07 RSS
Nikon Optistation-V Water Inspection System

A cost-effective inspection unit featuring a small footprint and a full range of optical techniques.

The Optistation-V offers an ergonomic design and a user-friendly operating environment. This compact-size wafer inspection system also offers high accuracy and high throughput. The Optistation-V macro illuminators simplify visual macro inspections of unevenness, defocus, and other items that had been difficult to observe in conventional systems.

Key Features

* Small footprint and high throughput decreases cost of ownership.
* User friendly operating environment. The Optistation V incorporates the powerful and expandable DART software for the ultimate control of wafer inspection systems.
* Dual feeder arms and rotating triple arms are used in the transfer system to achieve high throughput.
* A clean transfer system suppresses contamination. SMIF is supported (available as an option).
* 125, 150, and 200mm (5", 6", 8") wafers can be transferred and inspected. (100 mm (4") support is available as an option.)
* Full range of optical techniques. Accommodates brightfield, darkfield, Nomarski DIC as well as confocal observation.
* Image archiving, GEM/SECSII, VARS option.


Wafer Size/type: 8, 6, 5 in. (200, 150, 125 mm) (SEMI/JEIDA standards) 4 in. (100 mm) (option)
Microscope (micro) observations : Total magnification - 20 to 3,000X; Observation modes - Brightfield, darkfield, Nomarski DIC, confocal (CF1, CF2); Illumination - Precentered lamphouse (12V-100W halogen lamp); High intensity lamps available as options. Power coherent illumination (150W metal halide light source, option)
Eyepiece tubes: Tilting trinocular eyepiece tube
Auto focus: LED illumination slit projection
Nosepieces: Motorized BD quintuple nosepiece (standard); Motorized DIC quintuple nosepiece (option)
Objectives: CF objectives for CF Infinity Corrected optics, e.g. Epi Plan, Epi Plan Apo, BD Plan, BD Plan Apo series
Option: Confocal microscope unit
Macro observations (option): Rotation angle - 360° X/Y axes tilt - 0 to ?25, Backside observation (option); Macro illumination - Fiber illumination (halogen light source); Slit fiber and other options available
High precision stage: Stage travel (X-Y) 208 x 208 mm (8.2 in. x 8.2 in.) (observation area)
Observation points: Unlimited
Wafer transport: Number of elevators - 2, supports SMIF indexers (option); Elevator loading position - Front (standard); Transfer - Robotic handling by dual feeder arm and multi-rotary arm; vacuum chuck; non-contact pre-alignment; Functions - Sampling allocation.
Controller: Windows NT®
Communication with host computer: GEM/SECSII (option)
Dimensions (WxDxH), and weight (approx.): 1350 x 900 x 1446 mm (53.1 x 35.4 x 56.9 in.), 360 kg (790 lbs.); 995 x 1,000 x 1,200 mm (39.2 x 39.4 x 47.2 in.), 290 kg (639 lbs.) (Including vibration isolation table)
Vacuum rate: -800hPa (-600 mmHg) or less, flow rate 30 nl/min. or more
Power supply: 100 to 115V/220 to 240 AC ?10%, 15A max.
Operating temperature: 23° C (73° F) ±3° C (5.4° F)
Operating humidity: 50–20% RH

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