Nikon NEXIV FOUP CNC Video Measuring System

Nikon Updated: 2007-06-20

Provides all dimensional measurements required for wafer carrier fabrication including control of deformation due to aging of wafers and wafer carriers.

The NEXIV VM-450C - designed for use with 300mm Front Opening Unified Pod (FOUP) & Front Opening Shipping Box (FOSB) wafer carriers - detects hard to see edges using a variety of illumination features as well as Nikon's unique image processing technologies. By incorporating laser AF that provides quick non-contact focusing, even on transparent surfaces and on the edge of the peripheries of the wafer, the VM-450C is able to measure SEMI-standard dimensions with excellent accuracy.

Highlights

• Four side planes of the carrier are continuously measured by rotating the kinematic plate in 90° increments

• SEMI-compliant kinematic plate provides perfect X,Y,Z coordinates

• Variety of illumination choices facilitate accurate measurements of registration pin holes and latch-key holes

• Laser AF provides fast, non-contact measurements of wafer positions

• Wide area, high-intensity LED illumination enables accurate measurements of wafer heights

• 300mm, 200mm wafer carrier and SMIF Pod base