Hitachi S-4300 SE Analytical Schottky Field Emission Scanning Electron Microscope

* High probe current and high beam stability
* High resolution imaging
* Suitable for various analytical applications
* Integrated Robinson backscattered electron detector
* PCI image data management software

The S-4300SE is a high resolution Analytical Schottky Emission SEM (SESEM) that suits the needs of users in material and life sciences as well as semiconductor disciplines. It has been designed for applications that require:

1) high source brightness
2) high probe current
3) both short and long-term beam stability
4) high resolution imaging.

The S-4300SE can be fully integrated with various optional accessories including Cathode Luminescence (CL), Electron Backscattered Diffraction Pattern (EBSP), Energy Dispersive X-ray Spectrometer (EDX) and Electron Beam Lithography (EB).

System Specifications

Secondary Electron Image Resolution: 1.5nm (at 30kV) in customer's lab
5.0nm (at 1kV) in customer's lab
Electron Gun: ZrO/W Schottky Emission Source
Specimen Size: 160mm diameter