Hitachi S-4800 UHR Field Emission Scanning Electron Microscope

* 1.4nm resolution at 1kV with Beam Deceleration Technology
* 1.0nm Resolution at 15kV
* New Super ExB Filter
* 200mm specimen diameter
* 5 Axis motorized stage
* Advanced dry vacuum system

The S-4800 compliments the field proven performance and reliability of the S-4700 and S-5200 Field Emission SEMs. It employs a semi in-lens detector designed for large sample accomodation while achieving ultra-high resolution at low accelerating voltages. A new objective lens design with Hitachi's patented Super ExB filter technology collects and separates the various components of pure SE, compositional SE and BSE electron signals. The S-4800 can be fully integrated with many optional accessories including Energy Dispersive X-ray Spectrometer (EDX) and Electron Backscattered Diffraction Pattern (EBDP) systems. Ideal for ultra-high resolution appilcations such as semiconductor, materials studies and nanotechnology.

System Specifications

Secondary Electron Image Resolution: 1.0nm at 15kV
2.0nm at 1kV
1.4nm at 1kV with Beam Deceleration
Specimen Size: 200mm diameter
PC/OS: PC/AT compatible, Windows XP