Canon FPA-7000AS5 Scanner

Canon Updated: 2008-07-29 RSS
Canon FPA-7000AS5 Scanner

The new FPA-7000AS5 is a "dry" ArF scanning stepper, capable of sub-65nm resolution in a high-volume production environment


Ultra-low aberration ArF lens features the world's highest "dry" NA (0.93)

Newly designed advanced illumination system offers increased flexibility and efficiency in creating illumination conditions using Canon's Advanced Flexible Illuminator System (AFIS) and optional polarized illumination system (Option)

The Two-Wafer Stage System features 2 fully independent wafer stage units that allow precise stage control and high speed "free swapping" of the stage units to provide the highest productivity and stage accuracy in the industry

To meet the demands of extreme low-k1 lithography, the Canon In-House Solution Tool utilizes in-situ information to provide optimum exposure conditions

Semiconductor Specifications

Model type: ArF (193nm) Scanner
Wafer size: 300mm
Resolution: ≤45nm
Numerical Aperture (NA): 0.60 ~ 0.93
Reticle size: 6in.
Reduction ratio: 4:1
Field size: 26mm x 33mm
Overlay accuracy: ≤8nm